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AI agent for materials scientists

Thin Film Deposition Run Log Review Agent

Run deviations are linked to film property changes and corrected by approved recipe updates

AnalysisQuality controlDecisionsScience and research
See how it worksGet access
Thin Film Deposition Run Log Review Agent: what goes in, what the agent does and what you get

What it does

Thin film properties depend on pressure, deposition rate and temperature, and small drifts across runs go unnoticed until a film fails. This agent reads each deposition log and compares pressure, rate, substrate temperature and time to the recipe. It then correlates deviations with measured film properties, such as thickness, resistivity or adhesion. If a deviation matches a property change, it proposes a recipe correction. After the next run, it checks whether the correction worked. The scientist approves all recipe changes. Edge case: the thickness is off, but the quartz crystal monitor shows aging, so the agent flags the sensor before changing the recipe.

How it works

Follow the arrows from top to bottom. The orange dashed arrow is the loop: when a check fails, the agent goes back and tries again.

Start and resultWhat it doesA check on its own workWaits for your OKGoes back and retries
Yes, continueYes, continueApprovedNoNo 1 STARTS WHEN Deposition run completes 2 USES A TOOL Read the log and the recipe 3 DOES Compare pressure, rate and temperature to the recipe 4 USES A TOOL Read film measurements for the run 5 CHECKS THE RESULT Is the film within the specification for eachproperty? If not: list the off-spec property and the deviations inthis run. Back to step 3. 6 DOES Correlate deviations with property changes acrossrecent runs 7 CHECKS THE RESULT Is the sensor in good condition and calibrated? If not: flag the sensor and hold the recipe change. Backto step 3. 8 DOES Propose a recipe correction with expected effect 9 YOU APPROVE Scientist approves recipe changes 10 USES A TOOL Compare the next run to the prediction 11 RESULT Run review and correction record
Read the steps as a list
  1. Deposition run completes
  2. Read the log and the recipe
  3. Compare pressure, rate and temperature to the recipe
  4. Read film measurements for the run
  5. Is the film within the specification for each property?If not: list the off-spec property and the deviations in this run. Back to step 3.
  6. Correlate deviations with property changes across recent runs
  7. Is the sensor in good condition and calibrated?If not: flag the sensor and hold the recipe change. Back to step 3.
  8. Propose a recipe correction with expected effect
  9. Scientist approves recipe changesThe agent waits here for your OK.
  10. Compare the next run to the prediction
  11. Run review and correction record

How it decides

A deviation is a cause when it appears in runs with off-spec films and not in on-spec runs. Sensors are checked before recipe changes.

  • Flag a deviation above 5% from the recipe
  • Treat a rate sensor over 3 months from calibration as suspect
  • Require at least 3 runs before calling a correlation
  • Make one change per run

Make it yours

Every agent is a starting point. You choose these settings for your own situation.

  • Deviation alert level (default 5%)
  • Properties tracked
  • Sensor calibration age
  • Minimum runs for a trend

What keeps you in control

It always asks you first

  • Recipe changes

Hard limits

  • Never changes a recipe
  • Never deletes run logs

It stops when

  • Done: film in spec after correction
  • Stop: sensors cannot be verified

Set it up

We guide you through the set-up, step by step

Members get the full set-up guide for this agent. No technical skills needed: you copy, paste and upload.

10 minto set it up in your AI
5 AIsChatGPT, Claude, Copilot, Gemini, Grok
  • One set of instructions to paste into your AI, with the clicks for ChatGPT, Claude, Microsoft 365 Copilot, Gemini and Grok
  • The agent then walks you through connecting your own data, one source at a time
  • A downloadable copy with the flow chart, the rules and the full guide
Get access to this agent

An example run

What happensRun 88 gave a film 12 percent thinner than the 200 nm target. The agent saw rate 9 percent below recipe, so the spec check failed. The crystal monitor was 4 months past calibration, so the sensor check failed too and it held the recipe change. After recalibration, run 89 gave 197 nm with the original recipe. The scientist logged that no correction was needed.

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